发明名称 METHOD AND APPARATUS FOR MANUFACTURING AND INSPECTING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A method and apparatus for manufacturing and inspecting a semiconductor device are provided to be capable of preventing the deformation of a bonding wire when carrying out a resin injecting process, for considerably improving productivity and reliability. CONSTITUTION: A mold set-up process is carried out at a frame assembly made of a frame having a lead stay(8), a stage(6), and a semiconductor chip loaded at the upper portion of the stage, for forming a mold unit(10). A chip fixing process is carried out by pressing the semiconductor chip by using at least one chip fixing part(13) capable of being inserted/extracted into/from a cavity portion(12) of the mold unit. Then, a resin filling process is carried out at the resultant structure for completely filling the cavity portion.
申请公布号 KR20030047775(A) 申请公布日期 2003.06.18
申请号 KR20020077046 申请日期 2002.12.05
申请人 YAMAHA CORPORATION 发明人 SHIRASAKA KENICHI
分类号 H01L21/66;B29C45/14;B29C70/72;H01L21/56;H01L23/31 主分类号 H01L21/66
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