| 摘要 |
PURPOSE: To provide a method and apparatus for exposure which facilitates replacement of reticle or temperature control. CONSTITUTION: A vacuum reticle library 64 is provided with a plurality of steps 68 for mounting conveyed reticles, respectively. A channel 68a is formed in each of the steps 68. Temperature of each reticle on the step 68 can be controlled by flowing temperature-controlled water through the channel 68a in the step 68. An atmospheric reticle library 66 is provided with a plurality of steps 69. A reticle case 67 is mounted on each of the steps 69. The individual reticle cases 67 and the individual reticles are provided with bar codes 70, respectively. When the reticles are conveyed, the bar codes 70 thereon are each scanned for identification. |
