| 摘要 |
PURPOSE: An exhaust apparatus of a spinner equipment is provided to be capable of increasing the lifetime of the exhaust apparatus and carrying out stable processes by using a pair of exhaust pipes. CONSTITUTION: An exhaust apparatus of a spinner equipment is connected between a lower cup(10) and exhaust ports(21) formed in the bottom(20) of a process room for exhausting exhaust gas using vacuum pressure. A pair of large diameter pipes(30) are connected to the exhaust ports(21), respective. A pair of small diameter pipes(40) are connected to the lower cup(10). At this time, the small diameter pipes(40) are capable of moving up and down through the large diameter pipes(30). At the time, the outer surface of the small diameter pipe(40) nearly contacts the inner surface of the large diameter pipe(30).
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