| 摘要 |
An X type MEMS gyroscope has a first mass (151) vertically vibrating on a substrate and a second mass (152) horizontally vibrating on the substrate. A driving electrode (110) is disposed on the same surface with the first mass. When the first mass vertically vibrates, the second mass vibrates vertically together with the first mass. When angular velocity that is at a right angle to a movement direction of the first mass and the second mass is applied while the first mass is vertically vibrating, the second mass moves as Coriolis force is added to the second mass in a horizontal direction, and a sensing electrode (120) measures displacement of the second mass in the horizontal direction. All moving electrodes and stationary electrodes are disposed on the same surface, and all elements are manufactured by using one mask. Therefore, adhesion between the moving electrodes and the stationary electrodes is prevented and the manufacturing process is simplified. <IMAGE> |
