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发明名称	Testsystem für Halbleitervorrichtungen
摘要
申请公布号	DE10019790(C2)	申请公布日期	2003.06.18
申请号	DE20001019790	申请日期	2000.04.20
申请人	ADVANTEST CORP., TOKIO/TOKYO	发明人	OIKAWA, HISASHI;WATANABE, YASUO
分类号	G11C29/44;G11C29/48;G11C29/56;(IPC1-7):H01L21/66;G01R31/318;G11C29/00	主分类号	G11C29/44
代理机构		代理人
主权项
地址

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