发明名称 |
Method for defect and conductivity engineering of a conducting nanoscaled structure |
摘要 |
The invention relates to a method for defect (36) and conductivity engineering of a conducting nanoscaled structure (22) or at least one part of it by generating heat-induced migration, melting, sputtering and/or evaporation of conductive material of the nanoscaled structure by directing a focused electron beam on the nanoscaled structure or an individual portion (36) of it to be engineered and/or by applying one or multiple wires of the conducting nanoscaled structure by applying a current density JD,I whereas the current density JD,I has a value below a critical current density JC which is the current per cross-section area of the wire at which the wire fails due to overheating and electromigration, and not lower than 3 orders of magnitude below JC. The invention further relates to the use of a secondary electron microscope having a filter for detecting back scattered electrons for such a method and a respective secondary electron microscope having such a filter for detecting back scattered electrons. <IMAGE>
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申请公布号 |
EP1320117(A2) |
申请公布日期 |
2003.06.18 |
申请号 |
EP20020027938 |
申请日期 |
2002.12.13 |
申请人 |
SONY INTERNATIONAL (EUROPE) GMBH |
发明人 |
HARNACK, OLIVER;FORD, WILLIAM E.;WESSELS, JURINA;YASUDA, AKIO |
分类号 |
H01J37/305;(IPC1-7):H01J37/305 |
主分类号 |
H01J37/305 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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