| 摘要 |
PURPOSE: A thin film transistor array tester is provided to integrate a review step and a repair inspection step with each other to reduce a period of time required for testing the thin film transistor array. CONSTITUTION: A thin film transistor array tester includes a pattern inspection device, an MPS inspection device, and a repair device. The pattern inspection device forms poor coordinates of pixels through reflected lights. The MPS inspection device applies an electric signal to a thin film transistor to check a normal operation of the thin film transistor. The repair device detects a defect generated in the thin film transistor to judge whether or not the defect is repaired and repairs the defect when it is judged that the defect is repairable. The repair device is composed of a transparent stage(41) and a light source(43) placed under the stage.
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