| 发明名称 |
ANTIREFLECTIVE COMPOSITION |
| 摘要 |
Disclosed are new antireflective compositions including cross-linked polymeric particles including one or more chromophores. Also disclosed are methods of forming relief images using these antireflective compositions. |
| 申请公布号 |
EP1319197(A2) |
申请公布日期 |
2003.06.18 |
| 申请号 |
EP20010973177 |
申请日期 |
2001.09.19 |
| 申请人 |
SHIPLEY COMPANY LLC |
发明人 |
ZAMPINI, ANTHONY;DOCANTO, MANUEL;GORE, ROBERT, H. |
| 分类号 |
G03F7/004;G03F7/09;G03F7/11;H01L21/027;(IPC1-7):G03F7/09 |
主分类号 |
G03F7/004 |
| 代理机构 |
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