发明名称 |
POLISHING PAD COMPRISING PARTICULATE POLYMER AND CROSSLINKED POLYMER BINDER |
摘要 |
<p>A polishing pad is described as comprising, (a) particulate polymer selected from particulate thermoplastic polymer (e.g., particulate thermoplastic polyurethane), particulate crosslinked polymer (e.g., particulate crosslinked polyurethane and/or particulate crosslinked polyepoxide) and mixtures thereof; and (b) crosslinked organic polymer binder (e.g., crosslinked polyurethane binder and/or crosslinked polyepoxide binder), which binds the particulate polymer together. The particulate polymer and crosslinked organic polymer binder are distributed substantially uniformly throughout the polishing pad, and the pad has a percent pore volume of from 2 percent by volume to 50 percent by volume, based on the total volume of said polishing pad. Polishing pad assemblies are also described.</p> |
申请公布号 |
EP1318891(A1) |
申请公布日期 |
2003.06.18 |
申请号 |
EP20010971086 |
申请日期 |
2001.09.14 |
申请人 |
PPG INDUSTRIES OHIO, INC. |
发明人 |
SWISHER, ROBERT, G.;WANG, ALAN, E. |
分类号 |
B24B37/24;B24D3/32;B24D13/12;B24D13/14;(IPC1-7):B24D3/32;B24B37/04 |
主分类号 |
B24B37/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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