发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: To provide a semiconductor device and a method of manufacturing the same which can reduce adverse effect by formation of silicide on polysilicon and have advantage from the viewpoint of cost and microfabrication. CONSTITUTION: The area 12 where silicide is not yet formed is never overlapped with a PN-junction area of gate electrode forming layers 4a1, 4b1 by forming a PMOS forming area, and by covering polysilicon films 4a1, 4b1 with a fifth resist mask 10 so that the end part A of the resist mask 9 covering the polysilicon films 4a1, 4b1 is covered, when the arsenic ion (As¬+) having large mass is implanted. Accordingly, rise of resistance is prevented in the area 12 where silicide is not yet formed.
申请公布号 KR20030047660(A) 申请公布日期 2003.06.18
申请号 KR20020021255 申请日期 2002.04.18
申请人 FUJITSU LIMITED 发明人 KUMENO KAZUYUKI
分类号 H01L21/28;H01L21/265;H01L21/3205;H01L21/8238;H01L23/52;H01L27/092;H01L29/78;(IPC1-7):H01L21/822 主分类号 H01L21/28
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