High dielectric capacitor and method of manufacturing the same

摘要

A capacitor having a storage electrode and a plate electrode, wherein both are made of metal or metal oxide, a high dielectric film formed between the electrodes, and a method of manufacturing the same. A diffusion prevention film is found at the side of the storage electrode and on the plate electrode. Therefore, the invention prevents deterioration of the property in the dielectric film due to penetration of hydrogen ions during a subsequent thermal process thereby improving the reliability of a device.