| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic vibration oscillator with which an constantly stable ultrasonic vibration is obtained, and to provide a part bonding method using the ultrasonic vibration oscillator. <P>SOLUTION: A plurality of ultrasonic vibrators 120 are attached to a vibration member 110, and the oscillation of each ultrasonic vibrator is controlled by a control device 130. Accordingly, a vibrational state in a part 5 held by the vibration member is three-dimensionally controlled, and a deviation from target oscillation caused by variability in the working accuracy of the transmission member constituting the vibration member, can be corrected. Thereby, the same ultrasonic vibration is always generated. <P>COPYRIGHT: (C)2003,JPO |
