| 摘要 |
<P>PROBLEM TO BE SOLVED: To effectively utilize a substrate by approaching a zone to be coated to the periphery of the substrate in the formation of a liquid film while scanning linearly. <P>SOLUTION: The delivery of the substrate to a substrate holding part is performed by using a substrate transporting means having a function to align and delivering the pre-treated substrate to the substrate holding part in a coating unit. After the delivery, the precise position of the substrate is recognized by a position detecting means and the central coordinates of the substrate are obtained. The error in each center of the substrate and the substrate holding part is corrected if it is present and after the precise positioning of the zone of the substrate is recognized in a control part, the coating liquid is supplied to the zone. <P>COPYRIGHT: (C)2003,JPO |
