| 摘要 |
An appearance inspection method, and an-apparatus therefor, capable of acquiring high quality in-focus images throughout the entire zone of an inspection object, by acquiring simultaneously two images on different focal planes by.using two TDI cameras (23, 24) having a sensitivity in a respective wavelength band (lambd1,lambd2), slicing the images in accordance with a region division that is defined in advance, and comparing the images. According to another aspect of this invention, the images are acquired by a confocal microscope constituted by disposing two corresponding pin-holes (37, 38), on the illumination side of a microscope and its light reception side, and one TDI camera (40).
|
