摘要 |
PROBLEM TO BE SOLVED: To prevent leakage of bias potential and to prevent troubles due to excess adhesive. SOLUTION: An oscillator unit comprises dummy oscillators provided at the opposite ends of an array, and a plurality of driving oscillators disposed between the dummy oscillators. A resilient plate 38 has a two-layer structure of a stainless steel supporting plate 43 and an electrically insulating resilient film 44 wherein a resilient part 46 is formed by removing the supporting plate partially. In the resilient part, movable insular parts 47 each abutting against the forward end face part of the driving oscillator, and a fixed insular part 49 abutting against the forward end face part of the dummy oscillator are provided while being insulated electrically. An adhesive holdable recess is defined in the resilient part by the fixed insular part and the corner part at the forward end opening 52 of a containing space part is faced against the adhesive holding recess. COPYRIGHT: (C)2003,JPO
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