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发明名称
KRATZFESTE BESCHICHTUNG FÜR HALBLEITERBAUELEMENTE
摘要
申请公布号
AT242899(T)
申请公布日期
2003.06.15
申请号
AT20000958203T
申请日期
2000.08.02
申请人
INFINEON TECHNOLOGIES AG
发明人
FRANK, MANFRED;KROENINGER, WERNER;KOEPNICK, RENATE;HUMMEL, RICHARD;FISCHBACH, REINHARD;OPOLKA, HEINZ
分类号
G01B7/28;A61B5/117;C10M107/38;C10M107/50;C10M173/00;G06K9/00;H01L23/29;H01L23/31;(IPC1-7):G06K9/00
主分类号
G01B7/28
代理机构
代理人
主权项
地址
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