发明名称 VORRICHTUNG UND VERFAHREN ZUR ENERGIESTRAHLBEARBEITUNG
摘要 <p>The present invention provides a processing method by which a processing object is processed by allowing the processing object to travel relative to an energy beam for irradiating the processing object, wherein the relative traveling velocity is made to be proportional to the irradiation energy density per unit time and unit area of the energy beam on the processing object. The processing may be achieved with the construction, in which not only the work is allowed to travel, but also the energy beam such as the laser beam may be displaced during the processing. <IMAGE></p>
申请公布号 AT242677(T) 申请公布日期 2003.06.15
申请号 AT19990102734T 申请日期 1999.02.19
申请人 RICOH MICROELECTRONICS CO., LTD. 发明人 KINOSHITA, MAKOTO,;KOBAYASHI, TAKESHI,
分类号 B23K26/00;B23K15/00;B23K26/08;H01L21/027;(IPC1-7):B23K26/08 主分类号 B23K26/00
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