VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERSUBSTRATS,申请号AT19940309852T-传众专利搜索

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发明名称	VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERSUBSTRATS
摘要
申请公布号	AT242547(T)	申请公布日期	2003.06.15
申请号	AT19940309852T	申请日期	1994.12.28
申请人	CANON KABUSHIKI KAISHA	发明人	YAMAGATA, KENJI,;YONEHARA, TAKAO,
分类号	H01L21/762;(IPC1-7):H01L21/20;H01L21/76	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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