| 摘要 |
The invention comprises 1.1 a first partial device comprising a first waveguide for coupling in microwave energy, a first gas supply apparatus and a first apparatus for evacuating a coating chamber; 1.2 a second partial device comprising a second waveguide for coupling in microwave energy, a second gas supply line and a second apparatus for evacuating a coating chamber, where 1.3 the first and second partial devices can be moved relative to each other , where by means of such moving the coating chamber in which the substrate to be coated is place d can be opened and closed The invention is characterized in that 1.4 the first waveguide for coupling in microwave energy, the first gas supp ly apparatus and the first apparatus for evacuating the coating chamber and the second waveguide for coupling in microwave energy, the second gas supply apparatus and the second apparatus f or evacuating the coating chamber, respectively, are disposed coaxial to each other.</SDOA B>
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