发明名称 METHOD OF MANUFACTURING INCLINED DIFFUSE REFLECTION BODY AND STRUCTURE
摘要 <P>PROBLEM TO BE SOLVED: To suggest a new manufacturing process for an inclined diffuse reflection body and to propose a structure. <P>SOLUTION: Optical masks including a plurality of half tone exposure units 72 are used. A half tone photolithography process is performed for a positive light resist formed on a substrate. Only one exposure process and an appropriate drying step are enough for forming a plurality of inclined faces 84 and forming coarse astigmatism on the inclined faces 84. The sizes of a half tone exposure units 72 are selected at random. Each of the half tone exposure units 72 includes a plurality of parallel transmissive strips or shadow strips 74. The pitch of the transmissive strips or shadow strips 74 in a single half tone exposure unit 72 is arbitrary. The width of the shadow strips 74 gradually varies from one side of the half tone exposure units 72 to the other side. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003167103(A) 申请公布日期 2003.06.13
申请号 JP20010360042 申请日期 2001.11.26
申请人 IND TECHNOL RES INST 发明人 O ITSUKUN;GI MEITATSU;CHO JOBUN
分类号 G02B5/02;G02B5/08;G02F1/1335 主分类号 G02B5/02
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