| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transport fork that can be manufactured easily and can stably hold a wafer. SOLUTION: This wafer transport fork transports a semiconductor wafer by placing the wafer on its plate-shaped main body. In the fork, a columnar rubber body is arranged, with its longitudinal axis made parallel to the main body, so as to support the semiconductor wafer on its side face. COPYRIGHT: (C)2003,JPO |
