| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent A distortion or a deflection due to dead weight of a large- sized mask and to accurately perform the parallelization of a work with reference to the mask in a contact aligner or a proximity aligner. <P>SOLUTION: The mask M is fixed and held on the lower surface of a mask stage 1 by vacuum suction. By raising the work W (or a substitute for the work) and bringing the mask M and the work W into contact with each other all over the surface, the parallelization is performed. At such a time, the vacuum suction of the mask M is restarted after temporarily releasing the vacuum suction of the mask M by the mask stage 1 and finishing operation for parallelization. By releasing the suction of the mask M when force is exerted from the work W on the mask M from below, the distortion or the deflection of the mask is corrected by the force exerted from the work W on the mask M. Therefore, space between the mask M and the work W is made constant, and the variance of exposing accuracy can be reduced. <P>COPYRIGHT: (C)2003,JPO</p> |
