| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology capable of measuring accurately the differential value of a physical quantity generated on the positions at a distance without being influenced by a surrounding environment or the like and without being influenced by a physical quantity which is not a measuring object. SOLUTION: Light from a light source is inputted into a sensor pair constituted by a combination between a sensor generating the optical path difference in input light corresponding to the physical quantity which is a measuring object and the physical quantity which is not the measuring object and a sensor generating the optical path difference in input light corresponding to the physical quantity which is not the measuring object. Then, the light having the generated optical path difference outputted in response to the input is inputted into a sensor pair having the same optical path difference generation function prepared separately, and the light having the generated optical path difference outputted in response to the input is branched dually, and interference fringes are generated therefrom. The moving quantity corresponding to the differential value of the physical quantity which is the measuring object is detected by subtracting the moving quantity corresponding to the differential value of the physical quantity which is not the measuring object, to thereby measure the differential value of the physical quantity which is the measuring object. COPYRIGHT: (C)2003,JPO
|
