| 摘要 |
PROBLEM TO BE SOLVED: To easily simultaneously measure a temperature change of a substrate to which thick film paste is applied in a predetermined pattern, and temperature distribution inside the substrate when the substrate is dried inside a drying furnace. SOLUTION: This device comprises a carrying means for intermittently carrying the substrate with a predetermined cycle time at plural respective stop positions set along one direction inside the drying furnace and a carrying part constituted by plural support members arranged at the respective stop positions inside the drying furnace for supporting the substrate. A thermocouple H is installed on at least one tip of the plural support members. Temperature control of many main substrates is facilitated without replacing the thermocouple and thereby an efficient process control can be performed. Since the thermocouple is not attached to the substrate as usual, a thermocouple line is not needed to be wired and does not obstruct inside the drying furnace. COPYRIGHT: (C)2003,JPO
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