| 摘要 |
PROBLEM TO BE SOLVED: To provide a sliding guide member of an one axis isolation system using a bearing which has no influence to sliding performance even though load orthogonal to a sliding direction is given to the bearing. SOLUTION: The sliding guide member 38 of the one axis isolation system is arranged between a supporting structure and supported structure and absorbs their displacement by restraining amplitude of their relative vibration to an one axis direction. The bearing 44 comprised of a number of rolling bodies 42 maintaining a mutual position relationship by means of a retaining means 41 between a sliding shaft 39a and sliding cylinder 39b, which are fitted each other. Rattling conditions between the sliding shaft 39a and sliding cylinder 39b are removed, the corner at a lower end of the sliding shaft 39a and the corner at a bore side of an upper end of the sliding cylinder 39b are not touched in an extremely pressurized condition with an inner peripheral face of the sliding cylinder 39b and an outer peripheral face of the sliding shaft 39a, which are sliding counter parts respectively. Thus, generation of large friction and damage of both sliding surfaces are prevented and smooth motion is secured for a long time. COPYRIGHT: (C)2003,JPO
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