| 摘要 |
PROBLEM TO BE SOLVED: To provide a component transport that transports a component stored in a component storage device and prevents the component from being contaminated by suppressing the occurrence of particles from the transport, and to provide a component storage device using the transport. SOLUTION: The component transport is provided with a pedestal 20 on which the component is placed, a support section 21 which supports the pedestal 20, a levitation receiving section 23 which is provided under the support section 21 and has a first magnet means 23a used for obtaining the levitation. The transport is also provided with a section 22 to be towed which is provided in or under the support section 21 and has an attracted second magnet means 22a and third and fourth magnet means lid and 13 arranged to face the first and second magnet means 23a and 22a, respectively. The transport causes the pedestal 20 to levitate up by means of the magnetic forces of the first and third magnet means 23a and 11d and, at the same time, moves the pedestal 20 by moving the fourth magnet means 13 while attracting the second magnet means 22a of the section 22 to be towed. COPYRIGHT: (C)2003,JPO |
