| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate container which is capable of eliminating a space where gas stays stagnant and replacing gas inside the container completely with another. <P>SOLUTION: This precision substrate container is composed of a container main body 2 and a lid 3 and provided with through-holes through which inner gas inside the container can be replaced with another. A nozzle member 5 provided with nozzles blowing out the gas against both sides of a precision substrate W is fitted on a part of the through-holes, and the residual through- holes are made to serve as exhaust vents. The nozzles of the nozzle member 5 blow out clean air or inert gas direct against the precision substrates along both of their surfaces, by which a space where gas stays stagnant can be eliminated, dust or the like can be prevented from adhering to the substrates, and gas inside the container can be completely replaced with another. <P>COPYRIGHT: (C)2003,JPO</p> |
