发明名称 |
METHOD OF FORMING ELECTRONIC CIRCUIT, WIRING BOARD, ITS MANUFACTURING METHOD, MULTICHIP MODULE, AND ITS MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a method by which a multichip module that is provided with high-density wiring having excellent electrical characteristics and is molded with a molding resin can be formed. SOLUTION: In this method the wiring having excellent electrical characteristics is formed by forming wiring composed of an electroplated copper film and an electroplated nickel film on Cr/Cu, on which signal passing wiring joined to solder is formed by sputtering by using Cr/Cu/Cr wiring formed at a portion for grounding by sputtering. In the manufacturing process of the wiring, the wiring can be formed efficiently by using a long thin stainless substrate, because the substrate can be taken up in a roll. COPYRIGHT: (C)2003,JPO
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申请公布号 |
JP2003168706(A) |
申请公布日期 |
2003.06.13 |
申请号 |
JP20010365790 |
申请日期 |
2001.11.30 |
申请人 |
HITACHI LTD;HITACHI MAXELL LTD |
发明人 |
TENMYO HIROYUKI;YAMAGUCHI YOSHIHIDE;TSUNODA SHIGEHARU;HOZOJI HIROYUKI;KISHIMOTO SEIJI;YAMASHITA YUJI;SUKEGAWA YUICHI |
分类号 |
H01L21/60;(IPC1-7):H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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