发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide technology for increasing the manufacturing yield of a collectively molded package by preventing the generation of voids on its appearance. SOLUTION: A region of a resist 6 on a substrate 2 below the entire outer circumference or at least either one side of the outer circumference of a collectively molded sealing resin 9, or a region below the air vent 11 of a molding die is removed by a specified width. Since the region serves as an air vent or a convenient resin reservoir, voids are not trapped easily thus preventing the generation of voids on its appearance. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003168696(A) 申请公布日期 2003.06.13
申请号 JP20010368122 申请日期 2001.12.03
申请人 HITACHI LTD;HITACHI TOKYO ELECTRONICS CO LTD 发明人 OBATA KAZUHIKO;KURATOMI BUNJI;SHIMIZU FUKUMI;IMURA KENICHI
分类号 H01L21/56;(IPC1-7):H01L21/56 主分类号 H01L21/56
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