| 摘要 |
PROBLEM TO BE SOLVED: To provide a membrane for a gas sensor whose sensitivity is sufficient at a low temperature of 0°C or less, which is safe, whose reliability is high and whose element life is long and to provide a method of manufacturing the membrane. SOLUTION: The membrane for the gas sensor is provided with an element comprising a membrane 34 composed of a mixed layer of a catalyst metal 3 used to dissociate and adsorb hydrogen or a hydrogen-containing compound gas and a solid compound semiconductor 4 reduced by hydrogen atoms generated in the catalyst metal 3 and an optical means used to detect a change in the light absorption of the reduced semiconductor 4. A nitrate aqueous solution of a dinitrodianmine compound of the catalyst metal is mixed with the catalyst metal 3 in a sol-gel solution of the semiconductor 4, the sol-gel solution which is dispersed uniformly at a molecular level is coated on a substrate so as to be fired, and the membrane is formed. The sol-gel solution is coated on a glass substrate or a core for an optical fiber, it is dried at room temperature for a prescribed time, and the membrane is fired for a prescribed time at 250 to 400°C. COPYRIGHT: (C)2003,JPO
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