| 摘要 |
PROBLEM TO BE SOLVED: To automatically avoid contact between a probe and a sample surface and automatically measure the three-dimensional shape of the sample surface, in a scanning probe microscope. SOLUTION: By monitoring the height of the probe, while the probe is scanning the sample surface, contact between the probe and the sample surface is avoided automatically. A height-limiting value of the probe is preset. The height of the probe in a Z-direction measured by scanning is compared with the height limiting value. When the height of the probe reaches the height- limiting value or exceeds it, the distance in the Z-direction between the probe and the sample is widened and as a result, contact between the probe and the sample surface is thereby avoided. COPYRIGHT: (C)2003,JPO
|
