| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump control device having a high reliability which performs a stable motor control even in case the voltage to drive the motor has varied. SOLUTION: The vacuum pump control device 1 is supplied with a voltage from a power supply 15 and performs evacuation of a space 20 using a pump 9, whereby the voltage from the power supply 15 and the revolving speed of the motor 7 to drive the pump 9 are sensed when the motor 7 is put in the duty control, and the upper limit of the security voltage whereby the motor 7 is driven is set in accordance with the revolving speed. The control factor decided by the revolving speed/voltage is put in correspondence to the set upper limit of the security voltage so that the duty ratio is decided, and thereby the motor control is conducted. COPYRIGHT: (C)2003,JPO
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