| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle that prevents deterioration of an adhesive and a sealant due to cleaning light and can retain its function over a prolonged period of time. <P>SOLUTION: The pellicle 1 obtained by bonding a pellicle plate 2 comprising synthetic quartz glass to the opening of a pellicle frame 5 with an adhesive 4, is characterized in that the pellicle plate 2 has a first light shielding body 3 for protecting the adhesive 4 from irradiation with ultraviolet light and the pellicle frame 5 comprises quartz glass and has second light shielding bodies on its top surface and bottom surface and/or its outer surface and inner surface. <P>COPYRIGHT: (C)2003,JPO</p> |
