| 摘要 |
PROBLEM TO BE SOLVED: To finish scanning in a short time in comparison with the case of constantly scanning all strokes (arrows 19a and 19a') in each scanning. SOLUTION: In the three-dimensional height measuring method for an object, the object is photographed in a state of beams of slit light irradiated on the object, shapes of the beams of slit light are measured by sequentially scanning the beams 18a-18c of slit light in an acquired image by a predetermined shift amount s, and calculating a three-dimensional height of the object from the shapes. In each scanning (for example, the arrow 19a), when the beams 18a-18c of slit light are detected, next scanning is started (for example an arrow 19b) by returning a predetermined offset amount f and shifting the shift amount s. COPYRIGHT: (C)2003,JPO
|
