SPACE COORDINATE VALUE MEASURING METHOD, ITS MEASURING DEVICE AND DEFECT INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a space coordinate value measuring method, its measuring device and a defect inspection device using it calculating and determining intersection point coordinates of an object plane and a space straight line of a spotlight. SOLUTION: The spotlight B is irradiated on the object plane 4 from a spot indicating means 2. A signal transmitted from a positional information transmitting means 21 provided in the spot indicating means 2 is received by a three-dimensional measuring means 3. A three-dimensional position of the spot indicating means 2 and an irradiation angle of the spotlight B are acquired and positional information of the object plane 4 is acquired by a position detecting means 5. Intersection point coordinate values of the object plane 4 and the space straight line of the spotlight B in the same space coordinate system are calculated and determined by a calculating means 6 on the basis of the acquired pieces of information. COPYRIGHT: (C)2003,JPO