| 摘要 |
PROBLEM TO BE SOLVED: To obtain a sufficient irradiation light intensity and to enhance a detection accuracy in a surface inspection apparatus. SOLUTION: In the surface inspection apparatus, the surface of a substrate 5 is irradiated with a laser beam 2, scattering reflected light due to the laser beam is detected, and a foreign substance is detected. The inspection apparatus is provided with an irradiation optical system 7 whose light source part 12 comprises a plurality of light emitting source and by which the surface of the substrate is irradiated with laser beams from the respective light emitting sources as luminous fluxes whose optical axes are mutually parallel. COPYRIGHT: (C)2003,JPO
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