| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate controller and a flow rate control method for making it unnecessary to prepare any probe being the factor of any trouble such as a fine pipe or a minimum orifice, and for making the controllable flow rate range of gas much wider without changing the sizes of parts. SOLUTION: In operating the opening of a proportional valve 17 after opening and closing an interrupting valve 12, the opening of the proportional valve 17 is operated based on a pressure P of the process gas of a gas filling volume 13 measured by a pressure sensor 14, and the pressure slope of the process gas of the gas filing volume 13 is controlled so as to be fixed. Thus, it is possible to adjust the mass/flow of the process gas outflowing from the proportional valve 17. COPYRIGHT: (C)2003,JPO
|
