| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection apparatus for a printed board, etc., by which any fine flaw or the like on the surface of a specimen can be detected surely and efficiently. SOLUTION: The visual inspection apparatus is provided with an electronic camera 4 which can be run in the X-Y direction on the surface of the printed board 8 or the like mounted in a position to be inspected, an X-direction illumination means 6 which can illuminate a prescribed range along the X-direction together with the electronic camera 4 and a Y-direction illumination means 7 which can illuminate a prescribed range along the Y-direction. The electronic camera 4 is stopped in a prescribed position on the surface of the printed board 8, and the means 6 and the means 7 are turned on alternately. COPYRIGHT: (C)2003,JPO
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