SEMICONDUCTOR LIGHT EMITTING ELEMENT, MANUFACTURING METHOD THEREFOR, OPTICAL TRANSMISSION MODULE, OPTICAL EXCHANGING DEVICE, AND OPTICAL TRANSMISSION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor light emitting element capable of improving light emitting characteristics in the semiconductor light emitting element provided with a semiconductor layer containing Al between a semiconductor substrate and an active layer containing nitrogen, and to provide the manufacturing method. SOLUTION: The manufacturing method is provided with a process of removing an Al source, an Al reactant, an Al compound, or Al, remaining in a place that can make a contact with a nitrogen compound source or an impurity contained in the nitrogen compound source inside a growth chamber after the growth of a first semiconductor layer 501 containing Al as a constituting element. Thereafter, a second semiconductor layer 502 containing Al whose layer thickness is less than the first semiconductor layer 501 containing Al is provided and then the active layer 204 containing nitrogen is formed. COPYRIGHT: (C)2003,JPO