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发明名称
HALBLEITERANORDNUNG UND VERFAHREN ZUR HERSTELLUNG
摘要
申请公布号
DE69624386(T2)
申请公布日期
2003.06.12
申请号
DE19966024386T
申请日期
1996.11.15
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO
发明人
MAEDA, SHIGENOBU;YAMAGUCHI, YASUO;IWAMATSU, TOSHIAKI
分类号
H01L21/336;H01L21/762;H01L21/84;H01L27/12;H01L29/40;H01L29/423;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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