Analysis of a composition

摘要

An analysis apparatus, in particular a spectroscopic analysis apparatus, comprises an excitation system (exs) for emitting an excitation beam (exb) to excite a target region during an excitation period. A monitoring system (lso) is provided for emitting a monitoring beam (irb) to image the target region during a monitoring period. The monitoring period and the excitation period being substantially overlap, so that monitoring the target region is maintained during excitation. The analysis apparatus is provided with a tracking system (osc, dcu) to control the excitation system to direct the excitation beam onto the target region.