| 摘要 |
<p>A substrate processing apparatus (10) comprising a frame, at least one processing module (36), and a substrate transport apparatus (34). The processing module (36) is connected to the exterior of the frame. The substrate transport apparatus (34) is connected to the frame for transporting substrates between the first chamber and the processing module exterior to the frame. The frame has a second integral chamber (28,30) formed therein. The second integral chamber (28,30) of the frame has a selectable configuration from a number of predetermined configurations. The configuration of the second integral chamber (28,30) to the frame is selected in accordance with a predetermined characteristic of the substrate processing apparatus.</p> |
