| 发明名称 |
Electron exposure device and method and electronic characteristics evaluation device using scanning probe |
| 摘要 |
Current passed through a resist layer or insulating layer is controlled by changing the amplitude of an AC voltage to provide an electron exposure device or electric characteristics evaluation device using a scanning probe.
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| 申请公布号 |
US2003107007(A1) |
申请公布日期 |
2003.06.12 |
| 申请号 |
US20020082341 |
申请日期 |
2002.02.26 |
| 申请人 |
HITACHI, LTD. |
发明人 |
HEIKE SEIJI;ISHIBASHI MASAYOSHI;HASHIZUME TOMIHIRO |
| 分类号 |
G01R31/02;H01J37/317;H01L21/027;(IPC1-7):A61N5/00;G21G5/00 |
主分类号 |
G01R31/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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