| 摘要 |
A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.
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