发明名称 METHOD FOR MANUFACTURING PATTERN-FORMING BODY AND PATTERN MANUFACTURING APPARATUS
摘要 <p>A uniform pattern is formed. Patterns (P1 to P6) are formed on a substrate (400) from liquid droplets ejected from a piezoelectric drive head unit (300). The sizes of the droplets ejected from orifices (300-1 to 300-n) are different with mechanical and electrical characteristics. The droplets are thinned so that the volumes of liquid of the liquid droplets impinging on the patterns (P1 to P6) per unit area may be the same.</p>
申请公布号 WO2003048818(P1) 申请公布日期 2003.06.12
申请号 JP2002012385 申请日期 2002.11.27
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