A METHOD AND DEVICE FOR MEASURING ATOMIC HYDROGEN FLOW DENSITY

摘要

A method and a sensing element for measuring the flow density of atomic hydrogen are presented. An electrically conductive thin-film of the sensing element is exposed to the flow of atomic hydrogen during a certain exposure time, and a time variation of the resistance of the thin film of the sensing element is measured during a time period within the exposure time. The measured time variation is utilized to determine the flow density of atomic hydrogen.