| 摘要 |
<p>A mixer (1) capable of uniformly mixing gases with different weights, a thin-film manufacturing device with the mixer (1), and a thin-film manufacturing method using film forming gas formed by mixing the gases in the mixer, the mixer (1) comprising a mixing chamber (2) having the gas inlets (5a, 6a) of two gas inlet pipes (5, 6) positioned so as to be opposed to each other and a mixing gas diffusion chamber (3), wherein a partition plate (4) is installed between the mixing chamber and the diffusion chamber so that the volume of the diffusion chamber is larger than that of the mixing chamber, and a gas outlet (7) is provided in the partition plate at a specified position on the vertical lower side of a straight line connecting two gas inlets to each other; the thin-film manufacturing device wherein a cylindrical sleeve member (61) is fitted to the side wall of a stage (53) inside a vacuum reaction chamber (2), and the height of the stage is set at a position where the volume of a second space on the lower side of the stage connected to a vacuum exhaust means is larger than that of a first space so that exhaust gas can be isotropically exhausted through a clearance between a sleeve member and the inside wall surface of the reaction chamber without causing convection in the first space between a gas head and the stage, whereby the gas flow of the mixing gas can be uniformized by suppressing the occurrence of turbulent flow, convection, and thermal convection.</p> |
