| 摘要 |
PURPOSE: A nozzle assembly is provided to allow the nozzle holder to have a compliance with respect to the spindle shaft by arranging flexible disks between the nozzle holder and external guide. CONSTITUTION: A nozzle assembly(10) comprises a nozzle holder(13) having an upper portion supported by a spindle shaft(11) and a lower portion where a nozzle is fixed(12); an external guide(14) formed integrally with the spindle shaft, and which accommodates the nozzle holder; and one or more flexible disks(15) each of which has a center fixed to the nozzle holder and an outer surface fixed to the external guide. The flexible disk has a strength in a horizontal direction, and a buffering aperture formed at the disk surface so as to increase a flexibility. The external guide includes an upper element(14a) formed integrally with the spindle shaft, and an intermediate element(14b) and a lower element(14c) which are coupled in such a manner that the flexible disks are arranged among the upper, intermediate and lower elements of the external guide.
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