TRANSFER MEMBER WITH ELECTRIC CONDUCTIVITY AND ITS MANUFACTURING METHOD

摘要

An electrically conductive transfer member for transferring precision equipment materials such as silicon wafers for semiconductors and glass substrates for liquid crystal display devices, as well as the method of manufacturing the transfer member. The transfer member has a carbon fiber reinforced composite material body with an electroconductive polymer part connected to at least some of the carbon fibers of the body. The electroconductive transfer member removes static electricity of the componen ts transferred by the transfer member.