METHOD FOR FORMING THIN FILM, SUBSTRATE HAVING TRANSPARENT ELECTROCONDUCTIVE FILM AND PHOTOELECTRIC CONVERSION DEVICE USING THE SUBSTRATE

摘要

A method for forming a thin film containing a metal oxide as a main component on a substrate, wherein the thin film is formed by the use of a raw material containing a chloride of the metal, and prior to the formation of the thin film, 1) particles containing the metal are provided on the substrate, or 2) a thin film containing the metal is formed at a rate of film formation being lower than that for the above-mentioned thin film, and further, in the case of 2), the thin film containing a metal oxide as a main component is formed directly on the thin film containing the metal. The method can be employed for forming a thin film with relatively uniform thickness, when it is intended to form a thin film containing a crystalline metal oxide as a main component by the use of the thermal decomposition method on a wide area of a substrate in a short time.